February 25, 2024

We are creating some awesome events for you. Kindly bear with us.

Taiwan’s AI-powered Optical Measurement System

The National Science and Technology Council (NSTC) aims to make Taiwan a world leader in advanced manufacturing and chip processes by supporting basic research and putting in place key science and technology policies.

Professor Liang-Chia Chen of National Taiwan University’s Department of Mechanical Engineering oversees the cross-disciplinary research team that the NSTC has set up to combine cutting-edge technologies like automated optical inspection (AOI), high-precision measurement, new optical instrumentation, and AI algorithms.

Because of this, the next generation of AOI systems is being made to meet the needs of modern manufacturing and semiconductors. The NSTC has also set up the Advanced Optical Inspection Equipment Association (AOIEC), which has 43 companies as members. The AOIEC is made up of university labs, equipment makers, and people who use the equipment.

The AOIEC is a specialised research and development organisation that makes inline AOI equipment for advanced automated optical inspection and precision engineering businesses.

It brings together research teams from colleges and works with top semiconductor vendors and Taiwan AOI makers. The goal is to create cutting-edge AOI technologies that are driven by artificial intelligence to fill important technological gaps in optical critical dimension (OCD) metrology for 3D advanced packaging.

The system has a depth-to-width ratio of 15 times and can measure openings as small as a submicron. This is a new technological breakthrough for advanced semiconductor packing technology as it won the 2022 NSTC Future Technology Award.

The miniaturisation of ICs and improvements in 3-D packaging technology brings benefits like shorter conductor lengths, better thermal conduction, higher signal bandwidth, lower power usage, and smaller package volumes, but they also make it harder to measure.

Silicon vias are an important part of advanced 3D packaging for chip assembly in the vertical direction. But as the size of silicon vias gets smaller and the ratio of depth to width goes up, it gets harder to find good ways to measure them.

Cross-sectional critical dimension measurements are mostly done with scanning electron microscopes (SEM), but this method is damaging and takes a long time. Atomic force microscopy could be used to read profiles, but it isn’t very good and can’t get into the hole very well.

To solve these problems, a new optical measurement device that uses AI was suggested. The approach uses physical optical simulation and AI deep learning optimisation to penetrate high-depth-ratio blind holes and quickly find precise critical dimension information, meeting strict inline process time demands.

Advanced reflectometry and scatterometry were used to build the visual measurement technology that uses AI. It uses new numerically controlled laser broadband light illumination for optical sensing and AI deep learning optimisation of inverse reasoning through new algorithms.

It has gotten past the technical problems of having a minimum aperture and the highest depth-to-width ratio that can be measured. Several new optical critical dimension (OCD) measurement systems and techniques have been made using this technology. These systems and techniques can measure world-leading micron-level silicon via critical dimensions with industrially confirmed results.

With a signal-to-noise ratio (SNR) 28 times higher than non-coherent light sources, the system can measure multiple key dimensions in real-time. This is a world record. This technology is currently the best in the world, and it can be used in many difficult measure situations.

This new idea has been given a Taiwan design patent (No. 111106641) and a US patent (No. 06A-210153US). The technology is also being developed with the help of equipment manufacturers. Several domestic AOI equipment manufacturers have helped with technology transfer and study.

PARTNER

Qlik’s vision is a data-literate world, where everyone can use data and analytics to improve decision-making and solve their most challenging problems. A private company, Qlik offers real-time data integration and analytics solutions, powered by Qlik Cloud, to close the gaps between data, insights and action. By transforming data into Active Intelligence, businesses can drive better decisions, improve revenue and profitability, and optimize customer relationships. Qlik serves more than 38,000 active customers in over 100 countries.

PARTNER

CTC Global Singapore, a premier end-to-end IT solutions provider, is a fully owned subsidiary of ITOCHU Techno-Solutions Corporation (CTC) and ITOCHU Corporation.

Since 1972, CTC has established itself as one of the country’s top IT solutions providers. With 50 years of experience, headed by an experienced management team and staffed by over 200 qualified IT professionals, we support organizations with integrated IT solutions expertise in Autonomous IT, Cyber Security, Digital Transformation, Enterprise Cloud Infrastructure, Workplace Modernization and Professional Services.

Well-known for our strengths in system integration and consultation, CTC Global proves to be the preferred IT outsourcing destination for organizations all over Singapore today.

PARTNER

Planview has one mission: to build the future of connected work. Our solutions enable organizations to connect the business from ideas to impact, empowering companies to accelerate the achievement of what matters most. Planview’s full spectrum of Portfolio Management and Work Management solutions creates an organizational focus on the strategic outcomes that matter and empowers teams to deliver their best work, no matter how they work. The comprehensive Planview platform and enterprise success model enables customers to deliver innovative, competitive products, services, and customer experiences. Headquartered in Austin, Texas, with locations around the world, Planview has more than 1,300 employees supporting 4,500 customers and 2.6 million users worldwide. For more information, visit www.planview.com.

SUPPORTING ORGANISATION

SIRIM is a premier industrial research and technology organisation in Malaysia, wholly-owned by the Minister​ of Finance Incorporated. With over forty years of experience and expertise, SIRIM is mandated as the machinery for research and technology development, and the national champion of quality. SIRIM has always played a major role in the development of the country’s private sector. By tapping into our expertise and knowledge base, we focus on developing new technologies and improvements in the manufacturing, technology and services sectors. We nurture Small Medium Enterprises (SME) growth with solutions for technology penetration and upgrading, making it an ideal technology partner for SMEs.

PARTNER

HashiCorp provides infrastructure automation software for multi-cloud environments, enabling enterprises to unlock a common cloud operating model to provision, secure, connect, and run any application on any infrastructure. HashiCorp tools allow organizations to deliver applications faster by helping enterprises transition from manual processes and ITIL practices to self-service automation and DevOps practices. 

PARTNER

IBM is a leading global hybrid cloud and AI, and business services provider. We help clients in more than 175 countries capitalize on insights from their data, streamline business processes, reduce costs and gain the competitive edge in their industries. Nearly 3,000 government and corporate entities in critical infrastructure areas such as financial services, telecommunications and healthcare rely on IBM’s hybrid cloud platform and Red Hat OpenShift to affect their digital transformations quickly, efficiently and securely. IBM’s breakthrough innovations in AI, quantum computing, industry-specific cloud solutions and business services deliver open and flexible options to our clients. All of this is backed by IBM’s legendary commitment to trust, transparency, responsibility, inclusivity and service.

Send this to a friend